Статья

Liubchenko, O. I.
Modeling of X-ray rocking curves for layers after two-stage ion-implantation / O. I. Liubchenko, V. P. Kladko, O. Y. Gudymenko // Semiconductor Physics, Quantum Elecnronics and Optoelectronics. – 2017. – Vol.20, № 3. – P. 355-361. : fig.